Ceramic heater and supporting pin

ABSTRACT

The present invention provides a ceramic heater which makes it possible to make the distance between a semiconductor wafer and the heating surface of a ceramic substrate constant at any time, heat the semiconductor wafer at an even temperature and prevent contamination of the semiconductor wafer, and which does not cause dropping-out of a supporting pin. The ceramic heater of the present invention comprises a ceramic substrate on a surface of which or inside which a heating element is formed, wherein the ceramic heater is constituted to have a structure that an object to be heated can be held apart from a surface of said ceramic substrate and heated.

TECHNICAL FIELD

[0001] The present invention relates mainly to a ceramic heater(semiconductor wafer heating device) used to heat a semiconductor waferand the like, and a supporting pin used in a ceramic substrateconstituting the ceramic heater (semiconductor wafer heating device).

BACKGROUND ART

[0002] Hitherto, a heater using a metal base material, such as stainlesssteel or aluminum alloy, has been used in semiconductor producing orexamining devices containing an etching device, a chemical vapordeposition device and the like.

[0003] However, a heater made of a metal has problems that itstemperature controlling property is poor and its thickness also becomesthick so that the heater is heavy and bulky. The heater also has aproblem that corrosion resistance against corrosive gas is poor.

[0004] In light of these problems, JP Kokai Hei 11-40330 and so ondisclose a heater wherein a ceramic such as aluminum nitride is usedinstead of a metal.

SUMMARY OF THE INVENTION

[0005] However, such a heater is used in the condition that an object tobe heated, such as a semiconductor wafer, is put on a ceramic substratein the state that the object contacts the ceramic substrate. Thus,temperature distribution on the surface of the ceramic substrate isreflected on the semiconductor wafer so that the semiconductor wafer orthe like cannot be uniformly heated.

[0006] If one attempts to make the surface temperature of the ceramicsubstrate uniform so as to heat the semiconductor wafer or the likeuniformly, highly complicated control is necessary. Thus, the control ofthe temperature is not easy.

[0007] An objective of the present invention is to solve the problemsassociated with the above-mentioned prior art, and to provide: a ceramicheater making it possible to heat uniformly the whole body of an objectto be heated, such as a semiconductor wafer, particularly at thetemperature range of 100° C. or higher; and a supporting pin, forsupporting the object to be heated, used in the ceramic heater.

[0008] The present invention is a ceramic heater (heating device) usedto heat an object to be heated, such as a semiconductor wafer.

[0009] A first aspect of the present invention is a ceramic heater(semiconductor wafer heating device) comprising a ceramic substrate, ona surface of which or inside which, a heating element is formed, whereinthe ceramic heater is constituted to have a structure that an object tobe heated can be held apart from a surface of the ceramic substrate andheated.

[0010] A second aspect of the present invention is a ceramic heatercomprising a ceramic substrate, on a surface of which or inside which, aheating element is formed, wherein the ceramic heater is constituted: tohave a structure that a face of the ceramic substrate on which noheating element is formed, or one face of the ceramic substrate is madeto be a heating surface; and to have a structure that an object to beheated, such as a semiconductor wafer, can be held apart from theheating surface and heated.

[0011] In the ceramic heater, a through hole in which a supporting pinfor holding the object to be heated such as a semiconductor wafer ispassed through is desirably formed in the ceramic substrate. Thesemiconductor wafer is desirably 5 to 5000 μm apart from the surface orthe heating surface of the ceramic substrate.

[0012] In the ceramic heater, a convex body is desirably formed on thesurface of the ceramic substrate. For this purpose, it is desired that athrough hole is formed in the ceramic substrate, and a supporting pin ispassed through and fixed into the through hole so that the convex bodyis formed on the surface of the ceramic substrate, or it is desired thata concave portion is formed on the heating surface of the ceramicsubstrate, and a supporting pin is inserted and fixed into the concaveportion so that the convex body or the convex portion is formed on thesurface of the ceramic substrate.

[0013] The convex body is preferably in a spire shape or hemisphereshape which can make a point contact with the object to be heated. Also,a tip of the supporting pin is preferably in a spire shape or in ahemispherical shape.

[0014] A third aspect of the present invention is a supporting pin,wherein: a contact portion formed at a tip; a fitting-in portion formedunder the contact portion which has a larger diameter than that of thecontact portion; a pillar-shaped body formed under the fitting-inportion which has a smaller diameter than that of the fitting-inportion; and a fixing portion formed on the lower end of thepillar-shaped body which has a larger diameter than that of thepillar-shaped body; are integrated to one body.

[0015] A fourth aspect of the present invention is a supporting pin,wherein: a pillar-shaped body; and a fixing portion having a largerdiameter than that of the pillar-shaped body are integrated to one body.

[0016] In the supporting pin according to the fourth aspect of thepresent invention, the tip of the pillar-shaped body is desirably in aspire shape or in a hemispherical shape.

[0017] A fifth aspect of the present invention is a ceramic heater:comprising a ceramic substrate, on a surface of which or inside which, aheating element is formed; and which is constituted to have a structurethat an object to be heated, such as a semiconductor wafer, can be heldapart from a surface of the ceramic substrate and heated, wherein: athrough hole composed of connected holes, said holes having mutuallydifferent diameters, is formed in the ceramic substrate; the supportingpin according to the third aspect of the present invention is passedthrough the through hole; the fitting-in portion of the supporting pinis inserted and fitted into the portion (hole) with the relatively largediameter of the through hole; and a metal member for fixing is fitted inbetween the fixing portion of the supporting pin and the bottom surfaceof the ceramic substrate.

[0018] A sixth aspect of the present invention is a ceramic heater:comprising a ceramic substrate, on a surface of which or inside which, aheating element is formed; and which is constituted to have a structurethat a semiconductor wafer can be held apart from a surface of theceramic substrate and heated, wherein: a concave portion is formed inthe heating surface side of the ceramic substrate; the supporting pinaccording to the fourth aspect of the present invention is inserted intothe concave portion; and a spring for fixing is fitted to the concaveportion so as to contact the wall surface of the concave portion in thestate that the spring for fixing surrounds the pillar-shaped body.

[0019] In the ceramic heater, an electrostatic electrode is desirablyset up inside the ceramic substrate.

BRIEF DESCRIPTION OF DRAWINGS

[0020]FIG. 1 is a plain view that schematically illustrates a ceramicsubstrate constituting the ceramic heater of the present invention.

[0021]FIG. 2 is a partially enlarged sectional view of the ceramicsubstrate illustrated in FIG. 1.

[0022]FIG. 3 is a plain view that schematically illustrates anotherexample of a ceramic substrate constituting the ceramic heater of thepresent invention.

[0023] FIGS. 4(a) and (b) are front views, each of which schematicallyillustrates a supporting pin of the present invention.

[0024]FIG. 5(a) is a partially enlarged sectional view thatschematically illustrates a ceramic substrate constituting the ceramicheater of the present invention, and FIG. 5(b) is a perspective viewillustrating a metal member for fixing.

[0025]FIG. 6(a) is a partially enlarged sectional view thatschematically illustrates a ceramic substrate constituting the ceramicheater of the present invention, and FIG. 6(b) is a perspective viewthat schematically illustrates the manner that a supporting pin isfitted in a concave portion in the ceramic substrate.

[0026]FIG. 7 is a partially enlarged sectional view that schematicallyillustrates a ceramic substrate constituting the ceramic heater (anelectrostatic chuck) of the present invention.

[0027]FIG. 8 is a partially cutaway perspective view that schematicallyillustrates a ceramic substrate constituting the ceramic heater of thepresent invention.

[0028]FIG. 9 is a partially cutaway perspective view that schematicallyillustrates a ceramic substrate constituting the ceramic heater of thepresent invention.

[0029]FIG. 10(a) is a sectional view that illustrates a convex bodyhaving a hemispherical portion set in a concave portion in a ceramicsubstrate, and FIG. 10(b) is a sectional view that illustrates aspherical convex body.

EXPLANATION OF SYMBOLS

[0030]1, 11, 81, 91 a ceramic substrate

[0031]1 c, 11 c a bottomed hole

[0032]1 a, 11 a a heating surface

[0033]1 b, 11 b a bottom surface

[0034]2, 12 a resistance heating element

[0035]3 a terminal pin

[0036]4 a heating element layer

[0037]5 a metal covering layer

[0038]6 a solder layer

[0039]7 a lifter pin

[0040]8 a through hole

[0041]9 a silicon wafer

[0042]13 a temperature-measuring element

[0043]15 a plated through hole

[0044]16 a blind hole

[0045]20, 30 a supporting pin

[0046]21 a contact portion (spire portion)

[0047]22 a fitting-in portion

[0048]23 a pillar-shaped portion

[0049]24 a fixing portion

[0050]27 a metal member

[0051]31 a pillar-shaped body

[0052]32 a fixing portion

[0053]37 a spring

[0054]41 a through hole

[0055]42 a concave portion

[0056]43 an electrostatic electrode

[0057]81 d, 91 d a convex portion

DETAILED DISCLOSURE OF THE INVENTION

[0058] All of the ceramic heaters of the present invention have a commoncharacteristic that they are made in the manner that a semiconductorwafer is held apart from a surface (heating surface) of their ceramicsubstrate and is heated. First, therefore, this characteristic will bedescribed, and subsequently the above-mentioned first to sixth aspectsof present inventions will be appropriately described.

[0059] In the following description, a semiconductor wafer is used as anexample of an object to be heated. A semiconductor wafer heating deviceusing this semiconductor wafer will be described as an example.

[0060] In the ceramic heater (a semiconductor wafer heating device) ofthe present invention, in the state that its ceramic substrate does notcontact the semiconductor wafer, the semiconductor wafer is heated.

[0061] By setting the semiconductor wafer and the ceramic substrate intothe state that they do not contact each other, it is possible to attainthe condition that the semiconductor wafer is not affected bytemperature distribution of the surface of the ceramic substrate. Thus,the temperature of the whole of the semiconductor wafer can be madeuniform. Upon heating, the heat of the ceramic substrate is conducted tothe semiconductor wafer by a convection of the air or radiation. Sincethe ceramic substrate and the semiconductor wafer do not contact eachother, an advantageous effect that: impurity elements, such as Na, B andY, contained in the ceramic substrate or sintering aids do notcontaminate the semiconductor wafer; is also obtained.

[0062] When a ceramic substrate on a surface of which a conductor layeris formed is used, the face of a ceramic substrate on which no heatingelement is formed (a surface opposite to the heating-element-formedsurface) is made to be a heating surface. This is because if a heatingelement is formed on the heating surface, a temperature distributionsimilar to the pattern of the heating element is generated on thesemiconductor wafer.

[0063] When a heating element is formed inside, it is desired that theface farther from the heating element is made to be a heating surface.This is because as heat is conducted in the ceramic substrate,temperature becomes uniform.

[0064] The method for heating a semiconductor wafer in the state thatthe semiconductor wafer is held apart from a surface (heating surface)of a ceramic substrate is not particularly limited. However, asdescribed about the second aspect of the present invention, it isdesired that a convex body or convex portion for holding thesemiconductor wafer is formed in the ceramic substrate.

[0065] This is because the semiconductor wafer can be supported by thisconvex body or convex portion and can be heated apart from the heatingsurface. In this case, the following methods are given: as illustratedin FIGS. 8,9, a method of forming convex portions 81 d,91 d on surfacesof ceramic substrates 81,91 and holding a semiconductor wafer by theconvex portions 81 d,91 d; as illustrated in FIGS. 5, 7, a method offorming a through hole 41 in a ceramic substrate 1, inserting asupporting pin 20 into this through hole 41, and holding a semiconductorwafer by the supporting pin 20; as illustrated in FIG. 6, a method offorming a concave portion 42 in a ceramic substrate 1, fixing asupporting pin 30 thereto, and holding and heating a semiconductorwafer; and so on.

[0066] The convex body preferably has a spire shape portion 7 (referenceto FIGS. 4 to 7), or a spherical or hemispherical portion (reference toFIG. 10). This is because the convex body can be set into the state ofpoint contact with an object to be heated. As illustrated in FIG. 10,the convex body may be spherical. This is because by embedding thisspherical body in a concave portion of a ceramic substrate, the contactthereof with a semiconductor wafer can be set into the point contact.FIG. 10(a) is a sectional view illustrating a convex body 50 having ahemispherical portion, and FIG. 10(b) is a sectional view illustrating aspherical convex body 60.

[0067] In the case that a convex portion is formed on the heatingsurface of a ceramic substrate, the portions may be convex portions 81 din a conical shape or in a pyramidic shape (a triangular pyramidic, aquadrangular pyramidic, or the like form) as illustrated in FIG. 8, ormay be a convex portion 91 d whose projection is formed in a ring form,as illustrated in FIG. 9.

[0068] As a supporting pin, a lifter pin 7 used to receive and deliver asilicon wafer can be utilized as illustrated in FIG. 2, or a supportingpin 20,30 illustrated in FIGS. 4(a), (b) can be used.

[0069] FIGS. 4(a), (b) are front views, each of which schematicallyillustrates the shape of these supporting pins.

[0070] The supporting pin 20 illustrated in FIG. 4(a) is a pin wherein acontact portion 21, for contacting a semiconductor wafer, formed at atip, a fitting-in portion 22 formed under the contact portion 21 whichhas a larger diameter than that of the contact portion 21, apillar-shaped body 23 formed under the fitting-in portion 22 which has asmaller diameter than that of the fitting-in portion 22, and a fixingportion 24 formed on the lower end of the pillar-shaped body 23 whichhas a larger diameter than that of the pillar-shaped body 23 areintegrated to one body.

[0071] The contact portion 21 is desirably; a spire portion in a spireplate shape or a spire pillar shape (that is, a shape having a pyramidat its tip and a prism under the pyramid, or a shape having a cone atits tip and a column under the cone);

[0072] or a hemispherical portion in a hemispherical shape or ahemispherical pillar shape.

[0073] As illustrated in FIG. 5, the supporting pin 20 is passed througha through hole 41 composed of connected holes, said holes havingmutually different diameters, and said through hole is formed in aceramic substrate 1. Then, the fitting-in portion 22 of the supportingpin is inserted into a hole 41 a having a relatively large diameter. Onthe other hand, the fixing portion 24 of the supporting pin 20 isexposed from a bottom surface 1 b of the ceramic substrate 1, and a Cfigure-shaped or an E figure-shaped metal member for fixing 27 called asnap ring is fitted and fixed between the fixing portion 24 and thebottom surface 1 b. Therefore, the supporting pin 20 is certainly fixedwithout dropping out from the ceramic substrate 1.

[0074] The tip of the supporting pin 20 is in a spire shape or ahemispherical shape and projects upward from a heating surface 1 a ofthe ceramic substrate 1. Therefore, the supporting pin 20 is set into apoint contact with a semiconductor wafer put on the ceramic substrate 1.Thus, the supporting pin 20 does not contaminate the semiconductorwafer, and any singular point (the hot spot where the temperature of acontact portion is high, or cooling spot with low temperature) is notgenerated.

[0075] A supporting pin 30 illustrated in FIG. 4(b) is a supporting pin,wherein: a pillar-shaped body 31 which has a tip in a spire shape; and afixing portion 32 having a larger diameter than that of thepillar-shaped body 31 are integrated to be one body.

[0076] As illustrated in FIG. 6, this supporting pin 30 is fixed asfollows: after a concave portion 42 is formed in a ceramic substrate 1,the supporting pin 30 is inserted into the concave portion 42, and thena C figure-shaped spring 37 is fixed into a concave portion 81 so as tocontact the wall surface of the concave portion 81 in the state that thespring for fixing surrounds the pillar-shaped body 31. As illustrated inFIG. 6(b), the C figure-shaped spring 37 is to open outwards. Thus, ifthe C figure-shaped spring 37 is inserted into a concave portion 42, theC figure-shaped spring 37 is fixed to an inner wall of the concaveportion 42 by contacting with the inner wall. On the other hand, afixing portion 32 of the supporting pin 30 is held by the Cfigure-shaped spring 37 so that the spring pin 30 can be certainly fixedto the inside of the concave portion 42.

[0077] The supporting pin may be formed solely at the central portion,and/or a plurality of the supporting pins may be formed at linearsymmetrical or point symmetrical positions along concentric circles.

[0078] The number of the supporting pins is desirably from 1 to 10 inany ceramic substrate having a diameter of 300 mm or less.

[0079] In the case that resistance heating elements 2 are formed on asurface (bottom surface) 1 b opposite to a heating surface 1 a of theceramic substrate 1, since the concave portion 42 is formed in theheating surface 1 a, the freedom, or flexibility of the pattern can beincreased. Further, since this concave portion 42 is not a through hole,it does not happen that the spring is off so that the supporting pin 30drops out.

[0080] The tip of the pillar-shaped body of the supporting pin 30 isdesirably in a spire shape. The reason for this is the same reason asmentioned on a supporting pin A.

[0081] The C figure-shaped metal member 27 or the spring 37 is desirablymade of a metal, particularly a metal which does not easily becomerusty, such as stainless steel or Ni alloy. The supporting pins 20 and30 are desirably made of a ceramic, and are more desirably made of anoxide ceramic such as alumina or silica. This is because they have asmall thermal conductivity so that cooling spots or hot spots are noteasily generated.

[0082] The fixing method using the C figure-shaped metal member 27 orthe spring 37 is different from a method using an adhesive agent and thelike, and is a physical fixing method. The metal member 27 and thespring 37 do not deteriorate by heat and the like.

[0083] The diameters of the through hole and the concave portion aredesirably from 1 to 100 mm, and more desirably from 2 to 10 mm. This isbecause; if the diameters are too large, cooling spots are generated.

[0084] In the present invention, a semiconductor wafer is locateddesirably 5 to 5000 μm and particularly desirably 5 to 500 μm apart fromthe surface or the heating surface of the ceramic substrate. If thedistance is below 5 μm, the temperature of the semiconductor waferbecomes uneven affected by the temperature distribution of the ceramicsubstrate. If the distance is over 5000 μm, the temperature of thesemiconductor wafer is not easily raised so that a temperaturedifference in the semiconductor wafer becomes large.

[0085] Particularly, the semiconductor wafer is located most desirably20 to 200 μm apart from the surface or the heating surface of theceramic substrate.

[0086] As illustrated in FIG. 7, in the ceramic heater of the presentinvention, electrostatic electrodes 43 may be formed inside a ceramicsubstrate 1. By sucking a semiconductor wafer, such as a silicon wafer9, by means of the electrostatic electrodes 43, a warp of thesemiconductor wafer can be directed to one direction and a dispersion inthe distance between a heating surface 1 a and the semiconductor wafercan be made small. As a result, the temperature of the semiconductorwafer can be made uniform, further.

[0087] It is desired that the ceramic substrate of the present inventioncontains carbon and the carbon content therein is from 200 to 5000 ppm.This is because the electrodes can be hidden (covered up) and black-bodyradiation can easily be utilized.

[0088] The diameter of the ceramic substrate of the present invention isdesirably 150 mm or more, and optimally 200 mm or more. This is because;in the substrate having such a large diameter, the temperature of itsheating surface is apt to become uneven and a temperature difference iseasily generated in a semiconductor wafer.

[0089] The ceramic substrate of the present invention is used desirablyat 100° C. or higher and particularly desirably at 200° C. or higher.This is because the temperature of the heating surface is apt to becomeuneven and a temperature difference is easily generated in asemiconductor wafer.

[0090] The ceramic material constituting the ceramic substrate for asemiconductor device of the present invention is not especially limited.Examples thereof include nitride ceramics, carbide ceramics, and oxideceramics.

[0091] Examples of the nitride ceramics include metal nitride ceramicssuch as aluminum nitride, silicon nitride, boron nitride, and titaniumnitride.

[0092] Examples of the carbide ceramics include metal carbide ceramicssuch as silicon carbide, zirconium carbide, titanium carbide, tantalumcarbide, and tungsten carbide.

[0093] Examples of the oxide ceramics include metal oxide ceramics suchas alumina, zirconia, cordierite and mullite.

[0094] These ceramics may be used alone or in combination of two or morethereof.

[0095] Among these ceramics, nitride ceramics and carbide ceramics aremore preferred to oxide ceramics. This is because they have a highthermal conductivity.

[0096] Aluminum nitride is most preferred among nitride ceramics sinceits thermal conductivity is highest, that is, 180 W/m·K.

[0097] In the present invention, it is desired that the ceramicsubstrate contains a sintering aid. The sintering aid that can be usedmay be an alkali metal oxide, an alkali earth metal oxide or a rareelement oxide, and is particularly preferably CaO, Y₂O₃, Na₂O, Li₂O orRb₂O among these sintering aids. The content of these sintering aids isdesirably from 0.1 to 10% by weight.

[0098] In the above-mentioned ceramic substrate, its brightness isdesirably N4 or less as the value based on the rule of JIS Z 8721. Thisis because the ceramic substrate having such a brightness is superior inradiant heat capacity and covering-up ability.

[0099] The brightness N represents a brightness scale with thebrightness of ideal black being taken as 0 and the brightness of idealwhite as 10 and the brightness of a sample is expressed on the scaledivided in 10 at equal intensity intervals of perceptual brightness, asN0 to N10.

[0100] In actual measurement, a comparison is made with color cardscorresponding to N0 to N10. In this case, decimal fractions are roundedto 0 or 5.

[0101] The heating element arranged on a surface of the ceramicsubstrate of the present invention or inside the ceramic substrate isdesirably made of a metal or a conductive ceramic. Preferred examples ofthe metal include noble metals (gold, silver, platinum and palladium),lead, tungsten, molybdenum, and nickel. Examples of the conductiveceramic include carbides of tungsten and molybdenum. These may be usedalone or in combination of two or more.

[0102]FIG. 1 is a plain view that illustrates a ceramic substrateconstituting the ceramic heater of the present invention. FIG. 2 is apartially enlarged sectional view thereof.

[0103] A ceramic substrate 1 is made in a disc form. Resistance heatingelements 2 are formed in the form of concentric circles on the bottomsurface of the ceramic substrate 1 in order to heat a heating surface 1a of the ceramic substrate 1 in the manner that the temperature thereofwill be wholly uniform. The resistance heating elements 2 are comprisinga heating element layer 4 and a metal covering layer 5.

[0104] About these resistance heating elements 2, two concentric circlesnear to each other, as a pair, are connected to produce one line. Toboth ends thereof are connected terminal pins 3, which will beinputting/outputting terminals, through a solder layer 6. Through holes8, into which lifter pins 7 will be passed through, are formed in anarea near the center of the ceramic substrate 1. Bottomed holes 1 c, inwhich temperature-measuring elements will be inserted, are formed on thebottom surface.

[0105] As shown in FIG. 2, the lifter pins 7 with a silicon wafer 9 putthereon, can be moved up and down. In this way, the silicon wafer 9 canbe delivered to a non-illustrated carrier equipment or can be receivedfrom the carrier equipment. In the present invention, the lifter pins 7receive the silicon wafer 9 and subsequently the lifter pins 7 arelowered to hold the silicon wafer 9, 5 to 5000 μm apart from the surfaceof the ceramic substrate 1 and heat the wafer. The heating is desirablyperformed at 150° C. or higher.

[0106]FIG. 3 is a sectional view that schematically illustrates aceramic substrate in which resistance heating elements are embeddedtherein.

[0107] In this case, the resistance heating elements 12 are usuallyformed in the ceramic substrate 11 and nearer to the bottom surfacethereof than the center thereof. However, the resistance heatingelements 12 may be formed being biased nearer to a heating surface 11 athan the center. Plated through holes 15 are formed just under endportions of the resistance heating elements 12. Blind holes 16 areformed under the plated through holes 15 so that the plated throughholes 15 are exposed. By connecting conductive wires (not illustrated)and so on to the exposed plated through holes 15, electric current canbe applied to the resistance heating elements 12.

[0108] The following will describe one example of the method forproducing the ceramic heater according to the present invention.

[0109] (1) First, ceramic powder, a binder, a sintering aid and so onare mixed. The average particle diameter of the mixed powder ispreferably about 0.1 to 5 μm. As the diameter is finer, thesinterability is made higher. However, if the diameter is too fine, thebulk density of the green product becomes small and the degree ofcontraction during sintering becomes large. Thus, the dimensionalaccuracy may be insufficient.

[0110] When an aluminum nitride substrate or the like is produced, asintering aid such as yttrium oxide (yttria: Y₂O₃) may be added to theabove-mentioned mixture.

[0111] (2) Next, a formed body obtained by putting the resultant powdermixture into a mold, or a lamination of the green sheets (each of whichis pre-fired) is heated and pressed at 1700 to 1900° C. and 8 to 20 MPain the atmosphere of an inert gas such as argon nitrogen, so as to besintered.

[0112] The ceramic substrate can be basically produced by firing theformed body comprising the ceramic powder mixture or the green sheetlamination. Thus, a ceramic substrate having therein the resistanceheating elements can be produced by the following manner: by embedding ametal plate (foil), a metal wire or the like, which will be resistanceheating elements, in the powder mixture at the time of putting theceramic powder mixture into the mold; or by forming a conductorcontaining paste layer, which will be resistance heating elements, onone green sheet among the laminated green sheets.

[0113] By producing a sintered body, forming a conductor containingpaste layer on the surface (bottom surface) thereof and then, firing theproduct, heating elements can be formed on the bottom surface.

[0114] The conductor containing paste for producing the heating elementsis not particularly limited, and is preferably a paste comprising notonly metal particles or a conductive ceramic for keeping electricalconductivity but also a resin, a solvent, a thickener and so on.

[0115] The metal particles are preferably of, for example, a noble metal(gold, silver, platinum and palladium), lead, tungsten, molybdenum,nickel or the like. These may be used alone or in combination of two ormore. These metals are not relatively easily oxidized and, when they aremade to thin layered electrodes or the like, have a sufficiently largeconductivity. On the other hand, when they are made to linear(band-form) resistance heating elements as shown in FIG. 1, they have asufficient resistance value for generating heat.

[0116] Examples of the conductive ceramic include carbides of tungstenand molybdenum. These may be used alone or in combination of two ormore.

[0117] The particle diameter of these metal particles or the conductiveceramic is preferably 0.1 to 100 μm. If the particle diameter is toofine, that is, below 0.1 μm, they are easily oxidized. On the otherhand, if the particle diameter is over 100 μm, they are not easilysintered so that the resistance value becomes large.

[0118] The shape of the metal particles may be spherical or scaly. Whenthese metal particles are used, they may be a mixture of sphericalparticles and scaly particles.

[0119] In the case that the metal particles are scaly or a mixture ofspherical particles and scaly particles, metal oxides between the metalparticles are easily retained and adhesiveness between the heatingelements and the ceramic substrate is made sure. Moreover, theresistance value can be made large. Thus, this case is profitable.

[0120] Examples of the resin used in the conductor containing pasteinclude epoxy resins and phenol resins. An example of the solvent isisopropyl alcohol. An example of the thickener is cellulose.

[0121] When the conductor containing paste for the resistance heatingelements is formed on the surface of the ceramic substrate, it isdesired to add a metal oxide besides the metal particles to theconductor containing paste and sinter the metal particles and the metaloxides. By sintering the metal oxide together with the metal particlesin this way, the ceramic substrate can be closely adhered to the metalparticles.

[0122] The reason why the adhesiveness to the ceramic substrate isimproved by mixing the metal oxide is unclear, but would be based on thefollowing. The surface of the metal particles or the surface of theceramic substrate is slightly oxidized so that an oxidized film isformed. Pieces of these oxidized films are sintered and integrated witheach other through the metal oxide so that the metal particles and theceramic substrate are closely adhered to each other. In the case thatthe ceramic constituting the ceramic substrate is an oxide, the surfaceis naturally comprising the oxide. Therefore, a conductor layer superiorin adhesiveness is formed.

[0123] A preferred example of the metal oxide is at least one selectedfrom the group consisting of lead oxide, zinc oxide, silica, boron oxide(B₂O₃), alumina, yttria, and titania.

[0124] These oxides make it possible to improve adhesiveness between themetal particles and the ceramic substrate without increasing theresistance value of the heating elements.

[0125] When the total amount of the metal oxides is set to 100 parts byweight, the weight ratio of lead oxide, zinc oxide, silica, boron oxide(B₂O₃), alumina, yttria and titania is as follows: lead oxide: 1 to 10,silica: 1 to 30, boron oxide: 5 to 50, zinc oxide: 20 to 70, alumina: 1to 10, yttria: 1 to 50 and titania: 1 to 50. The ratio is preferablyadjusted within the scope that the total thereof is not over 100 partsby weight.

[0126] By adjusting the amounts of these oxides within these ranges, theadhesiveness to the ceramic substrate can be particularly improved.

[0127] The addition amount of the metal oxides to the metal particles ispreferably 0.1% by weight or more and less than 10% by weight. The arearesistivity when the conductor containing paste having such acomposition is used to form the heating elements is preferably from 1 to10000 mΩ/□.

[0128] If the area resistivity is over 1000 mΩ/□, the calorific valuefor an applied voltage becomes too small so that, in ceramic substratewherein the heating elements are set on its surface, their calorificvalue is not easily controlled.

[0129] In the case that the heating elements are formed on the surfaceof the ceramic substrate, a metal covering layer is preferably formed onthe surface of the heating elements. The metal covering layer prevents achange in the resistance value owing to oxidization of the inner metalsintered body. The thickness of the formed metal covering layer ispreferably from 0.1 to 10 μm.

[0130] The metal used when the metal covering layer is formed is notparticularly limited if the metal is a metal which is not easilyoxidized. Specific examples thereof include gold, silver, palladium,platinum, and nickel. These may be used alone or in combination of twoor more. Among these metals, nickel is preferred.

[0131] In the case that the heating elements are formed inside theceramic substrate, no coating is necessary since the surface of theheating elements is not oxidized.

[0132] Next, through holes or concave portions, into which supportingpins will be inserted, are formed in the ceramic substrate having theresistance heating elements. The supporting pins are inserted thereinto.External terminals and so on are connected thereto. If necessary,bottomed holes are formed and thermocouples are buried therein.

[0133] The thus obtained ceramic substrate is set on a supporting caseor the like. Wires from the resistance heating elements andtemperature-measuring elements are connected to a control device. Insuch a way, the manufacturing of a semiconductor wafer heating device(ceramic heater) is finished.

[0134] A semiconductor wafer is held by the convex portion and so onformed on the ceramic substrate to keep a space having a distance of 5to 500 μm between the semiconductor wafer and the ceramic substrate. Thesemiconductor wafer is heated at 150° C. or higher to make it possibleto subject the wafer to various treatments.

BEST MODE FOR CARRYING OUT THE INVENTION EXAMPLE 1 Manufacturing of aCeramic Heater

[0135] (1) A composition of: 100 parts by weight of aluminum nitridepowder (made by Tokuyama Company, average particle diameter: 1.1 μm); 4parts by weight of yttrium oxide (Y₂O₃: yttria, average particlediameter: 0.4 μm); and 10 parts by weight of an acrylic binder weremixed, and the mixture was put into a mold and was hot-pressed at 1890°C. and at a pressure of 15 MPa for 3 hours to obtain a nitride aluminumsintered body.

[0136] This was cut out into a disk having a diameter of 210 mm toproduce a ceramic substrate 1. This ceramic substrate 1 was subjected tobe drilled to form three through holes 8 having a diameter of 10 mm.

[0137] (2) Next, a conductor containing paste was printed on the bottomsurface 1 b of the ceramic substrate 1 obtained in the step (1) byscreen printing. The pattern of the printing was made to be a pattern ofconcentric circles as shown in FIG. 1.

[0138] The used conductor containing paste was Solvest PS603D made byTokuriki Kagaku Kenkyu-zyo, which is used to form plated through holesin printed circuit boards.

[0139] This conductor containing paste was a silver-lead paste andcontaining 7.5 parts by weight of metal oxides comprising lead oxide (5%by weight), zinc oxide (55% by weight), silica (10% by weight), boronoxide (25% by weight) and alumina (5% by weight) per 100 parts by weightof silver. The silver particles had an average particle diameter of 4.5μm, and were scaly.

[0140] (3) Next, the sintered body on which the conductor containingpaste was printed was heated and fired at 780° C. to sinter silver andlead in the conductor containing paste and bake them onto the sinteredbody. Thus, heating elements 4 were formed. The resultant silver-leadheating elements 4 had a thickness of 5 μm, a width of 2.4 mm and anarea resistivity of 7.7 mΩ/□

[0141] (4) The ceramic substrate 1 subjected to the above-mentionedprocessing was immersed into an electroless nickel plating bathcomprising an aqueous solution containing 80 g/L of nickel sulfate, 24g/L of sodium hypophosphite, 12 g/L of sodium acetate, 8 g/L of boricacid, and 6 g/L of ammonium chloride to precipitate a metal coveringlayer 5 (nickel layer) having a thickness of 1 μm on the surface of thesilver-lead heating layer 4. Thus, resistance heating elements 2 weremade.

[0142] (5) By screen printing, a silver-lead solder paste (made byTanaka Kikinzoku Kogyo CO.) was printed on portions, to which terminalfor attaining connection to a power source would be attached, to form asolder layer.

[0143] Next, terminal pins 3 made of koval were put on the solder layer6 and the solder layer were heated and reflowed at 420° C. to attach theterminal pins 3 onto the surface of the heating elements 2.

[0144] (7) Thermocouples for temperature-control were inserted into thebottomed holes. A polyimide resin was filled into the holes and wascured at 190° C. for 2 hours. Then, this ceramic substrate (reference toFIGS. 1,2) was set on a supporting case and then connection of wires andother processes were performed to obtain a ceramic heater.

[0145] Next, lifter pins 7 were passed through the through holes 8 inthe ceramic substrate 1, and a silicon wafer 9 was put on the lifterpins 7. The lifter pins 7 were slowly lowered to set the distancebetween the silicon wafer and the ceramic substrate to 100 μm.

[0146] The side on which the resistance heating elements 2 were notformed was made to be a heating surface 1 a.

[0147] Furthermore, the temperature of the ceramic substrate 1 wasraised to 600° C. and then the highest temperature and the lowesttemperature of the silicon wafer 9 were measured by a thermoviewer(IR162012-0012, made by Japan Datum Company).

[0148] The highest temperature of the silicon wafer was 600° C. and thelowest temperature thereof was 595° C. The difference between thehighest temperature and the lowest temperature was 5° C.

[0149] A fluorescent X-ray analyzer (RIX2100, made by Rigaku) was usedto check contamination of the silicon wafer by Y. No contamination wasfound.

EXAMPLE 2 Manufacturing of a Ceramic Heater Having Therein ResistanceHeating Elements (FIG. 3)

[0150] (1) A paste obtained by mixing 100 parts by weight of aluminumnitride powder (made by Tokuyama Corp., average particle diameter: 1.1μm), 4 parts by weight of yttria (average particle diameter: 0.4 μm),11.5 parts by weight of an acrylic binder, 0.5 part by weight of adispersant, 0.2 parts by weight of an acrylic binder and 53 parts byweight of alcohols comprising 1-butanol and ethanol was formed by thedoctor blade process to produce a green sheet having a thickness of 0.47mm.

[0151] (2) Next, this green sheet was dried at 80° C. for 5 hours, andwas subjected to punching to make portions which would be through holes8, into which lifter pins having a diameter of 5.0 mm would be passedthrough, and portions which would be plated through holes 15 forconnection to external terminals.

[0152] (3) 100 parts by weight of tungsten carbide particles having anaverage particle diameter of 1 μm, 3.0 parts by weight of an acrylicbinder, 3.5 parts by weight of α-terpineol solvent, and 0.3 part byweight of a dispersant were mixed to produce a conductor containingpaste A.

[0153] 100 parts by weight of tungsten particles having an averageparticle diameter of 3 μm, 1.9 parts by weight of an acrylic binder, 3.7parts by weight of α-terpineol solvent, and 0.2 part by weight of adispersant were mixed to produce a conductor containing paste B.

[0154] This conductor containing paste A was printed on the green sheetby screen printing, to form a conductor containing paste layer. Theprinted pattern was a concentric circle pattern.

[0155] The conductor containing paste B was filled into the throughholes for plated through holes, to which external terminals would beconnected.

[0156] Thirty seven green sheets on which no tungsten paste was printedwere stacked on the upper side (heating surface) of the green sheetsubjected to the above-mentioned treatment, and 13 green sheets on whichno tungsten paste was printed were stacked on the lower side thereof at130° C. and a pressure of 8 MPa.

[0157] (4) Next, the resultant lamination was degreased at 600° C. innitrogen gas for 5 hours, and hot-pressed at 1890° C. and a pressure of15 MPa for 3 hours to obtain an aluminum nitride plate 3 mm inthickness. This was cut out into a disc of 230 mm in diameter to get aceramic substrate 11 having therein resistance heating elements having athickness of 6 μm and a width of 10 mm.

[0158] (5) Next, the ceramic substrate 11 obtained in the step (4) wasgrinded with diamond grindstone, and then a mask was put thereon to makebottomed holes 11 c (diameter: 1.2 mm, depth: 2.0 mm) for thermocouplesin the surface by blast treatment with SiC and the like.

[0159] (6) Furthermore, a part of the through holes for the platedthrough holes was hollowed out to make blind holes 16. Brazing goldcomprising Ni—Au was heated and reflowed at 700° C. to connect externalterminals (non-illustrated) made of koval to the blind holes 16.

[0160] Regarding the connection of the external terminals, a structure,wherein a support of tungsten supports at three points, is desirable.This is because the reliability of the connection can be kept.

[0161] (7) Thermocouples for temperature-control were inserted into thebottomed holes. This ceramic substrate (reference to FIG. 3) was set ona supporting case and then connection of wires and other processes wereperformed. Thus, a ceramic heater was obtained.

[0162] (8) Next, lifter pins 7 were passed through the through holes 8in the ceramic substrate 11, and a silicon wafer was supported by thelifter pins 7. The lifter pins 7 were slowly lowered to set the distancebetween the silicon wafer and the ceramic substrate to 150 μm. The sidewhich was farther from the heating elements was made to a heatingsurface 11 a.

[0163] Furthermore, the temperature of the ceramic substrate was raisedto 600° C. and then the highest temperature and the lowest temperatureof the silicon wafer were measured by a thermoviewer (IR162012-0012,made by Japan Datum Company).

[0164] The highest temperature of the silicon wafer was 600° C. and thelowest temperature thereof was 595° C. The difference between thehighest temperature and the lowest temperature was 5° C.

[0165] A fluorescent X-ray analyzer (RIX2100, made by Rigaku) was usedto check contamination of the silicon wafer by Y. No contamination wasfound.

EXAMPLE 3 Manufacturing of a Ceramic Substrate Having Supporting Pins 20

[0166] Basically, the same manner as in Example 1 was carried out, butthrough holes 41: each of which is composed of connected holes, adiameter of said hole at the heating surface side of the ceramicsubstrate was 5 mm and a diameter of said hole at the side oppositethereto was 3 mm; were formed (reference to FIG. 5). Supporting pins 30having a shape shown in FIG. 4(a) which is made of alumina were fittedinto the holes. Regarding the supporting pins 30, the diameter offitting-in portions 22 was about 5 mm, and the diameter of fixingportions 24 was 3 mm. The length of the pins 30 was about 6.1 mm. Thepins 30 were structured in such a manner that the fixing portions 24were exposed from a bottom surface 1 b of the ceramic substrate 1. Cfigure-shaped metal members 27 (reference to FIG. 5(b)) made ofstainless steel were fitted between the fixing portions 24 and thebottom surface (face opposite to the heating surface) 1 b of the ceramicsubstrate.

[0167] The supporting pins 20 projected by 100 μm from the wafer heatingsurface 1 a.

EXAMPLE 4 Manufacturing of a Ceramic Substrate Having Supporting Pins 30

[0168] Basically, the same manner as in Example 1 was carried out, butconcave portions 42 having a diameter of 3 mm and a depth of 2 mm wereformed in a heating surface side of a ceramic substrate 1. Supportingpins 30 having a shape shown in FIG. 4(b) and made of alumina wereinserted into the concave portions. Regarding the supporting pins 30,the diameter of pillar-shaped portions 31 was about 2 mm, and thediameter of fixing portions 32 was about 3 mm. The length of the pins 30was about 3.1 mm. C figure-shaped springs 37 made of stainless steelwere fitted into the concave portions 42 to fix the supporting pins 30.

[0169] The supporting pins 30 projected by 100 μm from the wafer heatingsurface 1 a.

EXAMPLE 5 Manufacturing of a Ceramic Substrate Having Convex Portions

[0170] Basically, the same manner as in Example 1 was carried out, but,by hot press conical-shaped convex portions 81 d as shown in FIG. 8 wereformed on the surface. The height of the convex portions 81 d was about400 μm.

EXAMPLE 6 Manufacturing of a Heater With an Electrostatic Chuck

[0171] Basically, the same manner as in Example 2 was carried out, butwhen the conductive paste A was printed on a green sheet by screenprinting to form a conductor containing paste layer, a heating elementpattern of concentric circles was printed and, besides it, a pattern ofdipolar electrostatic electrodes was printed on another green sheet.

[0172] Furthermore, through holes 41 were formed in the ceramicsubstrate 1 in the same manner as in Example 3. Supporting pins 20 werepassed through the through holes 41 and fixed by metal members 27 toobtain a ceramic substrate having a structure shown in FIG. 7. Thesupporting pins 20 were adjusted to project by 300 μm from the heatingsurface 1 a.

[0173] On the ceramic heaters according to Examples 1 to 6, thetemperatures of silicon wafers were measured by the thermoviewer(IR162012-0012, made by Japan Datum Company) to obtain the highesttemperature and the lowest temperature thereof. A fluorescent X-rayanalyzer (RIX2100, made by Rigaku) was used to check contamination ofthe silicon wafer by Y. The results are shown in Table 1.

EXAMPLE 7 Hot Plate Made of SiC

[0174] (1) A composition comprising 100 parts by weight of siliconcarbide powder (Diyasic GC-15, made by Yakushima Denko Co., Ltd.,average particle diameter: 1.1 μm), 4 parts by weight of carbon, 12parts by weight of an acrylic resin binder, 5 parts by weight of B₄C,0.5 part by weight of a dispersant, 1-butanol, ethanol, and alcohol werespray-dried to produce granular powder.

[0175] (2) Next, the granular powder was put into a mold and formed intoa flat plate form. Thus, a formed body was obtained.

[0176] (3) The formed body subjected to the processing was hot-pressedat a temperature of 1900° C. and a pressure of 20 MPa to obtain asilicon carbide sintered body having a thickness of 3 mm.

[0177] (4) Next, this silicon carbide sintered body was subjected toannealing treatment at 1600° C. in nitrogen gas for 3 hours, andsubsequently this plate was cut out into a disc having a diameter of 210mm to produce a plate body made of the ceramic (ceramic substrate 11).

[0178] Furthermore, glass paste (G-5270, made by Shoei ChemicalIndustries Co., Ltd.) was applied to the surface thereof. Thereafter,the plate was heated at 600° C. to melt the paste, and thus form a SiO₂layer having a thickness of 2 μm on the surface.

[0179] Next, this ceramic substrate was drilled and processed with acutting tool or material to form: through holes 15, into which lifterpins would be passed through; through holes, into which lifter pins forsupporting a silicon wafer would be passed through; and bottomed holes14 (diameter: 1.1 mm, depth: 2 mm), in which thermocouples would beburied. Further, one concave portion at the center; and three concaveportions arranged at equal intervals on a concentric circle: were formedin the wafer-heating surface side.

[0180] (5) Next, a conductor containing paste was printed on the bottomsurface of the sintered body obtained in the step (3) by screenprinting. The pattern of the printing was made to a pattern ofconcentric circles as shown in FIG. 1.

[0181] The used conductor containing paste was Solvest PS603D made byTokuriki Kagaku Kenkyu-zyo, which is used to form plated through holesin printed boards.

[0182] This conductor containing paste was a silver-lead oxide paste andcontaining 7.5 parts by weight of metal oxides comprising lead oxide (5%by weight), zinc oxide (55% by weight), silica (10% by weight), boronoxide (25% by weight) and alumina (5% by weight) per 100 parts by weightof silver. The silver particles had an average particle diameter of 4.5μm, and were scaly.

[0183] (6) Next, the sintered body on which the conductor containingpaste was printed was heated and fired at 780° C. to sinter silver andlead in the conductor containing paste and bake them on the sinteredbody. Thus, resistance heating elements 12 were formed. The resistanceheating elements of silver-lead 12 had a thickness of 5 μm, a width of2.4 mm and an area resistivity of 7.7 mΩ/□ at the neighboring of theirterminal portions.

[0184] (7) Next, the above-mentioned glass paste was applied to thesurface. The resultant was fired at 600° C. so that a glass coating wasdeposited on the surface.

[0185] At last, alumina balls for supporting a wafer were fitted in thecentral portion and the three concave portions around it.

Comparative Example 1

[0186] The same manner as in Example 1 was carried out, but the siliconwafer was brought into contact with the ceramic substrate. The samemeasurement was then carried out. The highest temperature of the siliconwafer was 605° C., and the lowest temperature was 595° C. The differencebetween the highest temperature and the lowest temperature was 10° C.The fluorescent X-ray analyzer (RIX2100, made by Rigaku) was used tocheck contamination of the silicon wafer by Y. It was observed that Ydiffused slightly on the back surface of the silicon wafer.

Test Example 1

[0187] The same manner as in Example 1 was carried out, but the distancebetween the silicon wafer and the ceramic substrate was set to 3 μm. Thesame measurement was then carried out. The highest temperature of thesilicon wafer was 605° C., and the lowest temperature was 595° C. Thedifference between the highest temperature and the lowest temperaturewas 10° C. The fluorescent X-ray analyzer (RIX2100, made by Rigaku) wasused to check contamination of the silicon wafer by Y. No contaminationwas observed.

Test Example 2

[0188] The same manner as in Example 1 was carried out, but the distancebetween the silicon wafer and the ceramic substrate was set to 510 μm.The same measurement was then carried out. The highest temperature ofthe silicon wafer was 597° C., and the lowest temperature was 594° C.This shows the fact that, although the temperature of the ceramicsubstrate was raised to 600° C., the temperature of the silicon waferwas somewhat low. Then, the ceramic substrate was observed with athermoviewer. As a result, the highest temperature of the silicon waferwas 605° C., and the lowest temperature was 595° C. The differencebetween the highest temperature and the lowest temperature was 10° C.The fluorescent X-ray analyzer (RIX2100, made by Rigaku) was used tocheck contamination of the silicon wafer by Y. No contamination wasobserved.

Test Example 3

[0189] The same manner as in Example 1 was carried out, but the distancebetween the silicon wafer and the ceramic substrate was set to 5100 μm.The same measurement was then carried out. The highest temperature ofthe silicon wafer was 400° C., and the lowest temperature was 410° C.The difference between the highest temperature and the lowesttemperature was 10° C. Although the temperature of the ceramic substratewas raised to 600° C., the temperature of the silicon wafer did not risesufficiently. The ceramic substrate was observed with a thermoviewer. Asa result, the highest temperature of the silicon wafer was 605° C., andthe lowest temperature was 595° C. The difference between the highesttemperature and the lowest temperature was 10° C. The fluorescent X-rayanalyzer (RIX2100, made by Rigaku) was used to check contamination ofthe silicon wafer by Y. No contamination was observed.

[0190] The results of Examples, the Comparative Example and TestExamples are shown in Table 1.

[0191] In Example 7, the separated distance was 50 μm, the highesttemperature was 600° C., and the lowest temperature was 595° C. Nocontamination by yttria was found.

[0192] Heating up to 150° C. was performed, and a wafer having atemperature of 25° C. was put on. The time until the heating temperaturerecovered to 150° C. was measured. In Examples 1 to 7, the time wasabout 25 seconds. On the other hand, in the Comparative Example and TestExample 1, the time was 50 seconds. In Test Example 2, the time wasabout 35 seconds. In Test Example 3, the time was 30 seconds. TABLE 1Separating Highest Lowest distance temperature temperature (μm) (° C.)(° C.) Contamination by Y Example 1 100 600 595 None Example 2 150 600595 None Example 3 100 600 595 None Example 4 100 600 595 None Example 5400 598 595 None Example 6 300 600 598 None Comparative Example 1 0 605595 Observed Test Example 1 3 605 595 None Test Example 2 510 597 594None Test Example 3 5100 400 410 None

[0193] As is clear from the results shown in Table 1, in the ComparativeExample 1, the temperature distribution of the ceramic substrate isreflected, as it is, on the temperature distribution of the siliconwafer. In Test Example 1, the temperature difference on the surface ofthe ceramic substrate is also reflected, as it is, on the temperaturedifference in the silicon wafer. Thus, it can not be said thattemperature uniformity is sufficient. On the other hand, in Test Example2, the temperature of the silicon wafer is slightly lower than that ofthe ceramic substrate. In Test Example 3, the temperature of the siliconwafer is extremely lower than that of the surface of the ceramicsubstrate. Thus, Test Example 3 is not practical.

[0194] In the ceramic substrates according to Examples 3, 4, thesupporting pins are fixed. Therefore, the distance between the siliconwafer and the heating surface of the ceramic substrate can always bemade constant even if the distance is not adjusted. The supporting pinsare physically fixed and are not easily damaged or deteriorated by heat.Also, dropping-out thereof is not caused.

[0195] In the ceramic substrate according to Example 5, theconical-shaped convex portions are formed on the surface of heatingsurface. The effort to fix the supporting pins and so on is not needed.Since the supporting pins need not be fixed, it is unnecessary to use aspring made of a metal, or a metal member for fixing. Also, any coolingspot, where the temperature thereof becomes extremely low, is notgenerated around the supporting pins.

[0196] In the ceramic substrate according to Example 6, the siliconwafer is sucked by the electrostatic chuck so that warp or strain of thesilicon wafer can be directed in one direction and the temperaturedifference in the silicon wafer can be virtually eliminated.

[0197] As is clear from the measurement results, shown in Table 1, ofcontamination of the silicon wafer by Y in Examples 1 to 6, diffusion ofY into the silicon wafer can be completely prevented by separating thesilicon wafer from the ceramic substrate.

Industrial Applicability

[0198] As described above, on the ceramic heater according to thepresent invention, a semiconductor wafer can be heated at a uniformtemperature. Moreover, contamination of the semiconductor wafer can beprevented. The supporting pin of the present invention does not drop outeven if it is heated. As a result, the distance between thesemiconductor wafer and the heating surface of the ceramic substrate canbe made constant at any time.

1. A ceramic heater comprising a ceramic substrate, on a surface ofwhich or inside which, a heating element is formed, wherein above saidceramic heater is constituted to have a structure that an object to beheated can be held apart from a surface of said ceramic substrate andheated.
 2. A ceramic heater comprising a ceramic substrate, on a surfaceof which or inside which, a heating element is formed, wherein saidceramic heater is constituted: to have a structure that a face of saidceramic substrate on which no heating element is formed, or one face ofsaid ceramic substrate is made to be a heating surface; and to have astructure that an object to be heated can be held apart from saidheating surface and heated.
 3. The ceramic heater according to claim 1or 2, wherein a through hole, in which a supporting pin for holding theobject to be heated is passed through, is formed in said ceramicsubstrate.
 4. The ceramic heater according to any of claim 1, 2 or 3,wherein said object to be heated is 5 to 5000 μm apart from the surfaceor the heating surface of said ceramic substrate.
 5. The ceramic heateraccording to claim 1 or 2, wherein a convex body or a convex portion isformed on the surface of said ceramic substrate.
 6. The ceramic heateraccording to claim 5, wherein a through hole is formed in said ceramicsubstrate, and a supporting pin is passed through and fixed into saidthrough hole so that the convex body is formed on the surface of saidceramic substrate.
 7. The ceramic heater according to claim 5, wherein aconcave portion is formed on the heating surface of said ceramicsubstrate, and a supporting pin is inserted and fixed into said concaveportion so that the convex body is formed on the surface of said ceramicsubstrate.
 8. A supporting pin, wherein: a contact portion formed at atip; a fitting-in portion formed under said contact portion which has alarger diameter than that of said contact portion; a pillar-shaped bodyformed under said fitting-in portion which has a smaller diameter thanthat of said fitting-in portion; and a fixing portion formed on thelower end of said pillar-shaped body which has a larger diameter thanthat of the pillar-shaped body; are integrated to one body.
 9. Asupporting pin, wherein: a pillar-shaped body; and a fixing portionhaving a larger diameter than that of said pillar-shaped body areintegrated to one body.
 10. The supporting pin according to claim 9,wherein a tip of said pillar-shaped body is in a spire shape or in ahemispherical shape.
 11. A ceramic heater: comprising a ceramicsubstrate, on a surface of which or inside which, a heating element isformed; and which is constituted to have a structure that an object tobe heated can be held apart from a surface of said ceramic substrate andheated, wherein: a through hole composed of connected holes, said holeshaving mutually different diameters, is formed in said ceramicsubstrate; the supporting pin according to claim 8 is passed throughsaid through hole; the fitting-in portion of said supporting pin isinserted and fitted into the portion with the relatively large diameterof said through hole; and a metal member for fixing is fitted in betweenthe fixing portion of said supporting pin and the bottom surface of saidceramic substrate.
 12. A ceramic heater: comprising a ceramic substrate,on a surface of which or inside which, a heating element is formed; andwhich is constituted to have a structure that an object to be heated canbe held apart from a surface of said ceramic substrate and heated,wherein: a concave portion is formed in the heating surface side of saidceramic substrate; the supporting pin according to claim 9 is insertedinto said concave portion; and a spring for fixing is fitted to saidconcave portion so as to contact the wall surface of said concaveportion in the state that the spring for fixing surrounds saidpillar-shaped body.
 13. The ceramic heater according to any of claims 1to 7, 11, and 12, wherein an electrostatic electrode is set up insidesaid ceramic substrate.